AFM XYZ Calibration Standards

affordable, quick and easy calibration of AFM systems

Introduction 

Atomic Force Microscopy (AFM) has become a valuable tool for imaging and accurate measurements on the micrometer and nanometer scale. In order to validate the measuring capabilities, the AFM system need to be correctly calibrated. On this page you will find a selection of affordable and accurate AFM calibration standards for Z-axis and  X-Y-axis  calibration; the HS series and the CS series.

The HS series with 20nm, 100nm and 500nm calibrated Z height also offer X – Y calibration for larger scanners in the 40-100µm range.

The CS calibration standard with 20nm Z height also enables X- Y-axis calibration at a smaller scanner size in the µm range.

The AFM calibration standard structures are all fabricated on a Si chip which is mounted on a 12mm stainless steel AFM disc with electrically conductive epoxy resin.

AFM calibration standards specifications table