AFM XYZ Calibration Standards
affordable, quick and easy calibration of AFM systems
Introduction
Atomic Force Microscopy (AFM) has become a valuable tool for imaging and accurate measurements on the micrometer and nanometer scale. In order to validate the measuring capabilities, the AFM system need to be correctly calibrated. On this page you will find a selection of affordable and accurate AFM calibration standards for Z-axis and X-Y-axis calibration; the HS series and the CS series.
The HS series with 20nm, 100nm and 500nm calibrated Z height also offer X – Y calibration for larger scanners in the 40-100µm range.
The CS calibration standard with 20nm Z height also enables X- Y-axis calibration at a smaller scanner size in the µm range.
The AFM calibration standard structures are all fabricated on a Si chip which is mounted on a 12mm stainless steel AFM disc with electrically conductive epoxy resin.
AFM calibration standards specifications table
Calibration Standard |
HS-20MG |
HS-100MG |
HS-500MG |
CS-20NG |
Product # |
AU-34-030020 |
AU-34-030100 |
AU-34-030500 |
AU-34-032020 |
Height (Z) |
20nm |
100nm |
500nm |
20nm |
X-Pitch |
10µm, 5µm |
10µm, 5µm |
10µm, 5µm |
10µm, 5µm, 500nm |
Y-Pitch |
10µm, 5µm |
10µm, 5µm |
10µm, 5µm |
10µm, 5µm, 500nm |
10µm pitch structure 500nm pitch |
Square holes / pillars |
Square holes / pillars |
Square holes / pillars |
Square holes / pillars |
10µm pitch area |
1x1mm |
1x1mm |
1x1mm |
1x1mm |
Die size |
5x5mm |
5x5mm |
5x5mm |
5x5mm |
Construction |
SiO2 on Si |
SiO2 on Si |
SiO2 on Si |
SiO2 on Si |
Mounted |
12mm AFM disc |
12mm AFM disc |
12mm AFM disc |
12mm AFM disc |
AFM calibration standard
-
HS-20MG AFM XYZ calibration standard, 20nm Z on 12mm AFM discSKU: AU-34-030020Units Per Package: 1From: $456.40
-
HS-100MG AFM XYZ calibration standard, 100nm Z on 12mm AFM discSKU: AU-34-030100Units Per Package: 1From: $456.40
-
HS-500MG AFM XYZ calibration standard, 500nm Z on 12mm AFM discSKU: AU-34-030500Units Per Package: 1From: $456.40
-
CS-20NG AFM XYZ calibration standard, 20nm Z on 12mm AFM discSKU: AU-34-032020Units Per Package: 1From: $1,321.16
-
CS-20NG AFM XYZ calibration standard, 20nm Z, unmountedSKU: AU-34-032021Units Per Package: 1From: $1,321.16
-
TGX AFM / SPM calibration grating, 3um pitch, undercut edgesSKU: AU-34-033010Units Per Package: 1From: $483.09
-
TGF11 AFM / SPM calibration grating, 10um pitch, trapezoid structureSKU: AU-34-033030Units Per Package: 1From: $483.09