AFM calibration standard

AFM XYZ Calibration Standards

affordable, quick and easy calibration of AFM systems

Introduction

CS-20NG AFM calibration standard

Atomic Force Microscopy (AFM) has become a valuable tool for imaging and accurate measurements on the micrometer and nanometer scale. In order to validate the measuring capabilities, the AFM system need to be correctly calibrated. On this page you will find a selection of affordable and accurate AFM calibration standards for Z-axis and X-Y-axis calibration; the HS series and the CS series.

The HS series with 20nm, 100nm and 500nm calibrated Z height also offer X – Y calibration for larger scanners in the 40-100µm range.

The CS calibration standard with 20nm Z height also enables X- Y-axis calibration at a smaller scanner size in the µm range.

The AFM calibration standard structures are all fabricated on a Si chip which is mounted on a 12mm stainless steel AFM disc with electrically conductive epoxy resin.

AFM calibration standards specifications table

Calibration Standard	HS-20MG	HS-100MG	HS-500MG	CS-20NG
Product #	AU-34-030020	AU-34-030100	AU-34-030500	AU-34-032020
Height (Z)	20nm	100nm	500nm	20nm
X-Pitch	10µm, 5µm	10µm, 5µm	10µm, 5µm	10µm, 5µm, 500nm
Y-Pitch	10µm, 5µm	10µm, 5µm	10µm, 5µm	10µm, 5µm, 500nm
10µm pitch structure 5µm pitch structure 500nm pitch	Square holes / pillars Round holes, pillars & lines -	Square holes / pillars Round holes, pillars & lines -	Square holes / pillars Round holes, pillars & lines -	Square holes / pillars Round holes, pillars & lines Round holes
10µm pitch area 5µm pitch area 500nm pitch area	1x1mm 500x500µm -	1x1mm 500x500µm -	1x1mm 500x500µm -	1x1mm 500x500µm 100x100µm
Die size	5x5mm	5x5mm	5x5mm	5x5mm
Construction	SiO2 on Si	SiO2 on Si	SiO2 on Si	SiO2 on Si
Mounted	12mm AFM disc	12mm AFM disc	12mm AFM disc	12mm AFM disc