Maginification Cal. MCS-1

EM-Tec MCS series magnification calibration standards
ideal SEM calibration standard with 2.5mm to 1 µm or 100nm patterns

Order EM-Tec MCS series magnification calibration standards

Introduction

The EM-Tec MCS series magnification calibration standards are unique, cost effective, wide range SEM calibration standards. These fullly featured practical calibration standards can be used for magnification calibration or critical dimension measurements in table top SEM, standard SEM, FESEM, FIB, Auger, SIMS and reflected light microscope systems.

Two types of calibration ranges for the Em-Tec MCS calibration standards are offered, both standard with certificates traceability or optionally with an individual certificate of calibration:

EM-Tec MCS-1 with a scale ranging from 2.5mm to 1µm; ideal for table top and compact SEMs, covers 10x to 20,000x magnifications.
We offer a traceable and a certified version
EM-Tec MCS-0.1 with a scale ranging from 2.5mm down to 100nm; ideal for SEM, FESEM and FIB systems, covers 10x to 200,000 magnifications.
We offer a traceable and a certified version

The features on the EM-Tec MCS series are made using state of the art MEMS manufacturing techniques with high contrast chromium deposited lines for for the larger features and gold over chromium for the smaller features below 2.5µm The gold deposited ensure optimum signal to noise ratio for calibration purposes. Advantages of the EM-Tec MCS series are:

unprecedented precision over the full calibration range
all features in one single ultraflat plane
metal on silicon with excellent signal to noise ratio
wider range of features to accurately calibrate low, medium and high magnification ranges
compatible with both SE and BSE imaging
fully conductive materials
easy to convert feature sizes
can be cleaned with plasma cleaning
all NIST traceable or optionally certified

The EM-Tec MCS-0.1 calibration standard is an excellent replacement for the discontinued SIRA calibration standard (which was using only 0.51 and 0.463µm features) with added advantages. Compatible feature sizes for the SIRA standard are 50µm (5x10µm) and 0.5µm (500nm).

31-C32000 EM-Tec MCS-0.1CF certified calibration standard, 2.5mm to 100nm

AU-31-C32000 EM-Tec MCS-0.1CF certified calibration standard 2.5mm to 100nm
order info

Specifications for the EM-Tec MCS series calibration standards

Substrate	525µm thick boron doped ultra-flat wafer with <100> orientation
Conductive	Excellent; 5-10 Ohm resistivity
Pattern size	2.5 x 2.5mm
Features MCS-1	2.5, 1.0, and 0.5mm 250, 100, 10, 5, 2.5 and 1µm
Features MCS-0.1	with additional 500, 250 and 100nm
Features material	50nm Chromium for feature sizes 2.5mm to 2.5µm 50nm Gold over 20nm Chromium for size 1µm to 100nm
Traceable uniformity	0.2% or better
Certified uniformity	0.03%
Traceable uncertainty	0.7% or better
Certified uncertainty	0.09%
Traceability	Wafer level NIST traceability; average date measured on each production wafer
Certified	Optional; each certified EM-Tec MCS standard is individually calibrated against a NIST measured standard
Application	SEM, FESEM, FIB, Auger, SIMS and reflected light microscopy
Identification	Product ID with serial number etched
Mounting	Unmounted, mounting optionally available
Supplied	Supplied in a Gel-Pak box

Full list of available specimen mounts for calibration standard and test specimens

Technical Support Bulletin: EM-Tec MCS-1 & MCS-0.1 Magnification Calibration Standards

Ordering Information for EM-Tec MCS series magnification calibration standards

# AU-31-T31000 EM-Tec MCS-1TR traceable magnification calibration standard, 2.5mm to 1µm

2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm and 1µm.

The AU-31-T31000 EM-Tec MCS-1TR is traceable on the wafer level against a NIST measured calibration standard. Offered unmounted or mounted on the most popular SEM stubs. Example of wafer level certificate of traceability for the EM-Tec MCS-1TR magnification calibration standard, 2.5mm to 1µm.
We also offer a individually certified version.

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Full list of available specimen mounts for calibration standard and test specimens

# AU-31-C31000 EM-Tec MCS-1CF certified magnification calibration standard, 2.5mm to 1µm

The EM-Tec MCS-1 calibration standard has been developed to accurately calibrate table top SEM, reflected licht microscopes, compact SEMs and the low to medium magnification range of standard SEMs. Suitable for magnifications from 10x to 20,000x. Brigth chromium deposited features on ultra-flat conductive silicon. The feature sizes for the MCS-1 are:
2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm and 1µm.
The AU-31-C31000 EM-Tec MCS-1CF is individually certified utilizing a NIST measured calibration standard. Offered unmounted or mounted on the most popular SEM stubs.

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Full list of available specimen mounts for calibration standard and test specimens

# AU-31-T32000 EM-Tec MCS-0.1TR traceable magnification calibration standard, 2.5mm to 100nm

The EM-Tec MCS-0.1 calibration standard has been developed to accurately calibrate SEM, FESEM, FIB, Auger, SIMS and reflected light microscope systems. Suitable for magnifications from 10x to 200,000x. Bright chromium deposited features on ultra-flat conductive silicon for features to 2.5µm and gold over chromium for 1µm to 100nm features. The metal lines on silicon exhibit excellent signal with high contrast. The feature sizes for the MCS-0.1 are:
2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm, 1µm, 500nm, 250nm and 100nm. The EM-Tec MCS-0.1 is NIST traceable on the wafer level against a NIST calibrated standard. Offered unmounted or mounted on the most popular SEM stubs. Good alternative for the discontinued SIRA calibration standard. Example of wafer level certificate of traceability for the EM-Tec MCS-0.1TR magnification calibration standard, 2.5mm to 100nm.

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Full list of available specimen mounts for calibration standard and test specimens

# AU-31-C32000 EM-Tec MCS-0.1CF certified magnification calibration standard, 2.5mm to 100nm

The EM-Tec MCS-0.1 calibration standard has been developed to most accurately calibrate SEM, FESEM, FIB, Auger, SIMS and reflected light microscope systems. Suitable for magnifications from 10x to 200,000x. Brigth chromium deposited features on ultra-flat conductive silicon for features to 2.5µm and gold over chromium for 1µm to 100nm features. The metal lines on silicon exhibit excellent signal with high contrast. The feature sizes for the MCS-0.1 are:
2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm, 1µm, 500nm, 250nm and 100nm. The AU-31-C32000 EM-Tec MCS-0.1CF is individually NIST certified utilizing a NIST calibrated standard. Offered unmounted or mounted on the most popular SEM stubs. Excellent alternative for the discontinued SIRA calibration standard with easier to use compatible feature sizes. Example of individual certificate of calibration for the EM-Tec MCS-0.1CF certified magnification calibration standard, 2.5mm to 100nm

Excellent alternative for the discontinued SIRA calibration standard with easier to use compatible feature sizes, see TSB AU-31-C32000 EM-Tec MCS-0.1CF replacement for SIRA calibration standard

(More images)

Full list of available specimen mounts for calibration standard and test specimens