Individual Graticules

Micro-Tec Individual Graticule Calibration Standards

ideal for low magnifications, large areas, microscope stages and digital imaging systems

Introduction

The new and innovative Micro-Tec individual graticule calibration standards have been designed using an ultra-flat conductive silicon substrate with corrosion resistant Cr lines. They are manufactured utilizing the latest semiconductor manufacturing techniques. The Micro-Tec graticule calibration standards provide high contrast images for ease of calibration. Each of the calibration standards has a unique product ID and serial number etched on the die. Each of the Micro-Tec graticule calibration standard is fully NIST traceable and are supplied with a certificate of traceability. The Micro-Tec graticule calibration standards are ideally suited for:

reflective light microscopes
stereo microscopes
optical magnifiers
low magnification SEM
digital imaging systems
quality control measurements

The Micro-Tec family of silicon based graticules for bright-field applications consists of:

CCS-1 1mm cross scale pattern with 0.01mm divisions
CCS-5 5mm cross scale pattern with 0.01mm divisions
CCS-10 10mm cross scale pattern with 0.01mm divisions
LCS-10 10mm compound linear scale with 1.0, 0.1 and 0.01mm divisions
CCS-2.5 1 inch cross scale pattern with 0.001inch divisions

CCS-5 5mm cross scale, 0.01mm div., Si/Cr, opaque 31-T33200 CCS-5 5mm cross scale, 0.01mm div., Si/Cr, opaque

The deposited Cr lines are in the same focus plane as the substrate, better defined and provide more signal than etched patterns. They are also less prone to accumulate dust particles in the patterns.

General specifications for all Micro-Tec graticule standards:

Substrate	525µm thick boron doped ultra-flat wafer with <100> orientation
Conductive	Excellent, 5-10 Ohm resistivity
Lines	75nm thick, 5.0µm wide pure Chromium lines
Identification	Product ID with serial number etched
Mounting	Unmounted standard
Supplied	Supplied in a Gel-Pak box

Specifications for the individual Micro-Tec graticule calibration standards :

Product #	Name	Pattern size	Units / Div	Die size	Traceable	Mounting
AU-31-T33100	Micro-Tec CCS-1	1mm cross	0.01mm	3.5x3.5mm	Yes, NIST	Optional
AU-31-T33200	Micro-Tec CCS-5	5mm cross	0.01mm	6.0x6.0mm	Yes, NIST
AU-31-T33300	Micro-Tec CCS-10	10mm cross	0.01mm	12.0x12.0mm	Yes, NIST
AU-31-T33400	Micro-Tec LCS-10	10mm long	1.0/0.1/0.01mm	6.0x12.0mm	Yes, NIST
AU-31-T33500	Micro-Tec CCS-2.5	1 inch cross	0.001inch	3.5x3.5mm	Yes, NIST

--> An alternative calibration standard is the MTC-5 multiple target calibration standards with cross scale pattern, circles, squares and hexagons. Covers both magnification calibration and images distortion assessments. Available for both brightfield and darkfield applications.