Coaters From Safematics

compact – modular – innovative

Highlights and features

• Sputtering, vaporising of carbon thread and plasma treatment (hydrophilic/hydrophobic) with one single device
• Use of targets with a diameter of 54mm and thickness of up to 3mm, which are changed easily and quickly
• Long life targets
• The magnetron sputter head allows for fine-grained sputtering for high-resolution FE-SEM applications
• Sputtering of indium tin oxide (ITO) and carbon possible
• Glass reaction cylinder Ø120mm (DIN 100 ISO-KF compatible) with implosion guard and safety monitoring
• Automatic target shutter
• Electronically regulated process vacuum with Pirani and cold cathode measuring system
• Automatic valve control for two process gases and venting
• Target cooling with temperature monitoring
• Round stage, height-adjustable and tiltable (Ø80mm) to hold your samples. The table can be easily removed without tools for cleaning purposes.
• Speed-controlled rotary or planetary gear table with different options for holding samples
• Film thickness measurement via double-quartz measuring system (for small samples at the centre, for large samples at the edge)
• Integrated membrane pump “MD 1 Vario-SP” (HV version)
• Integrated turbo pump “Hi Pace 80” (HV version)
• Wide range power supply (90-260VAC)
• 5.7’’ TFT-Touch graphical display
• Intuitive user software with many useful features
• Easy creation of coating recipes, which guarantee reproducible results
• Storage/view of the last ten processes
• Graphical representation of process data with Windows-based software Coating LAB
• Feature for automatic venting of system in the event of power loss. This prevents the system from becoming contaminated with backing pump oil (LV version).
• USB interface for easy analysis and update of software
• Uniform interface for different process heads
• Automatic process head recognition
• 6mm Legris connections for two process gases and a venting gas
• Flange connection (DN 25 ISO-KF) for connecting an external backing pump (LV version)
• Can be used as a pure pumping unit for flexible use
• Small size and weight
• Swiss quality

The service technician can run a quick error analysis thanks to
the integrated USB service interface. The modular set-up allows
for the targeted replacement of defective components.

Link: Device and options