Wafer holders
EM-Tec wafer holders for SEM
compatible with either wafers with a flat or with a notch
EM-Tec wafer holders with pin | EM-Tec with wafer holders M4
Introduction
The EM-Tec wafer holders are specially designed to hold semi-conductor wafer in sizes of 100mm, 150mm and 200mm diameter (4 inch, 6 inch and 8 inch). They are compatible with wafers with either a flat or with a notch. The unique locking slide is adjustable to cope with non-standard wafers.
Unique features of the EM-Tec wafer holders:
- low profile, weigth balanced support disc
- square cut-outs for wafer tweezers
- adjustable spring tension
- adjustable for non-standard wafers
- self lubricating locking slide
- compatible with either wafers with a notch or wafers with a flat
- compatible with EM-Tec stage adapters for all SEM platforms
Available with:
- standard pin to fit on SEMs which use the standard pin; FEI, Philips, Zeiss, LEO, Leica, Tescan, Aspex, RJLee, AmRay, Cambridge Instruments, CamScan, ETEC and Novascan SEMs.
- M4 threaded hole; compatible with Hitachi SEMs, FESEMs and table top SEMs and with the EM-Tec versatile SEM stage adapters
Capacity and dimensions for the EM-Tec wafer holders:
Product # |
Type |
Wafer sizes |
Dimensions w/o pin |
Securing methode |
SEM stage comp. |
AU-12-000284 |
W4 |
100mm / 4” |
Ø106x16mm |
Springloaded slide |
Standard 3.2mm pin |
AU-12-000384 |
W4 |
100mm / 4” |
Ø106x16mm |
Springloaded slide |
M4 thread |
AU-12-000286 |
W6 |
150/mm / 6” |
Ø156x16mm |
Springloaded slide |
Standard 3.2mm pin |
AU-12-000386 |
W6 |
150mm / 6” |
Ø156x16mm |
Springloaded slide |
M4 thread |
AU-12-000288 |
W8 |
200mm / 8” |
Ø206x16mm |
Springloaded slide |
Standard 3.2mm pin |
AU-12-000388 |
W8 |
200mm / 8” |
Ø206x16mm |
Springloaded slide |
M4 thread |
Ordering Information for EM-Tec wafer holders for SEMs using pin stubs; FEI, Philips, Zeiss, LEO, Tescan, Aspex, RJLee, AmRay, Cambridge Instruments, Leica, CamScan, Aspex, ETEC and Novascan SEMs.