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CSX Calibration Standards

EM-Tec CXS calibration and RXS reference standards for EDS, WDS and BSD
compact & practical analytical standards

Order EM-Tec CXS calibration and reference standards for EDS, WDS and BSD

Introduction

The EM-Tec CXS calibration and reference standards are designed for calibration, resolution testing and performance testing. Each standard contains a selection of reference materials, in the form of element or compounds, optimized for specific calibration tasks. They are available with two types of practical and compact holders:

- Compact Ø12.7mm standard aluminium pin stub with up to 10 elements/compounds. The pin stub holder is compatible with FEI, Philips, Zeiss, Leo, Tescan, Phenom, Aspex, Leica, Cambridge instrument and CamScan SEMs
- Ø25.4 x 9mm stainless steel 303 block for larger numbers of element/compounds. Compatible with the EM-Tec M26 metallographic mount holders and the EM-Tec reference holders.

  Example
EM-Tec RXS-10PD peak deconvolution test standard, 10 materials plus F/C on pin stub
EM-Tec RXS-10PD peak deconvolution test standard, 10 materials plus F/C on pin stub
     

The elements/compounds are all mounted with highly conductive and vacuum compatible silver filled epoxy. The mounts are then polished to ensure that all the elements/compounds are in the same plane. Virtually all standards include a Faraday cup to enable electron probe measurements and monitoring. The calibration standards with non-conductive elements/compounds are carbon coated to ensure conductivity and avoid charging.

For using the calibration standards on JEOL and Hitachi SEM, please consult the page with the EM-Tec SEM stub adapters.

The Em-Tec calibration and reference standards are intended for calibration and testing of:

- SEM / EDS systems and/or SEM / WDS systems
- SEM back scattered electron detector (BSD)
- SEM cathode-luminescence (CL) detector
- SEM / Raman system 
 -SEM / micro-XRF systems
- micro-XRF systems

Overview and specifications of the various EM-Tec CXS calibration and reference standards

Product #

Type

Calibration application description

Standards #

Far. cup

Size

AU-36-000505

CXS-5F

Light elements, EDS detector

5

Yes

12.7mm x pin

AU-36-000506

CXS-5C

Light elements, EDS detector, Image

5

No

12.7mm x pin

AU-36-000507

CXS-5BE

BSD, EDS detector

5

Yes

12.7mm x pin

AU-36-000522

CXS-6BE

BSD, EDS detector

6

Yes

12.7mm x pin

AU-36-000510

CXS-10BE

BSD, EDS detector

10

Yes

12.7mm x pin

AU-36-000508

CXS-5N

Light elements, EDS detector

5

Yes

12.7mm x pin

AU-36-000512

CXS-5LE

Light elements detection performance

5

Yes

12.7mm x pin

AU-36-000513

CXS-5TX

EDAX  TEX set-up

5

Yes

12.7mm x pin

AU-36-000514

CXS-5LX

EDAX LEX / TEX set-up

5

Yes

12.7mm x pin

AU-36-000517

CXS-6F

EDS detector & performance

6

Yes

12.7mm x pin

AU-36-000521

CXS-6LE

Light elements, EDS detector

6

Yes

12.7mm x pin

AU-36-000618

RXS-18RE

Rare earth metals reference

18

Yes

25.4x9mm

AU-36-000621

RXS-21RE

Rare earth metals reference

21

Yes

25.4x9mm

AU-36-000636

RXS-36M

Metals reference

36

Yes

25.4x9mm

AU-36-000640

RXS-40MC

Mineral & compounds reference

40

Yes

25.4x9mm

AU-36-000707

RXS-6CL

Cathode-luminescence reference

7

Yes

12.7mm x pin

AU-36-000710

RXS-10PD

Peak deconvolution, resolution test

10

Yes

12.7mm x pin

AU-36-000711

RXS-10RA

Raman performance

10

Yes

12.7mm x pin

AU-36-000712

RXC-2WSi

Fusion, BSD/X-ray contrast & resolution

2

No

12.7mm x pin

AU-36-000714

RXC-2TaSi

Fusion, BSD/X-ray contrast & resolution

2

No

12.7mm x pin

Filters

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