EM-Tec silicon SEM finder grid substrate 
144 individual, indexed fields for multiple samples and correlative microscopy

Introduction 

The novel EM-Tec FG1 silicon SEM finder grid substrate consists of an a 12x12mm chrome deposited grid with a 1mm pitch on a conductive ultra-flat silicon substrate. The substrate is divided into 144 indexed fields of 1x1mm where each of the fields has a unique alphanumeric label in the lower right corner.  The alphanumeric label is easy to see with a magnifier, stereo microscope and/or SEM.  The grid produced is comparable with 25 mesh and is practical for larger particles or small samples mounted on the substrate in separate fields. The EM-Tec FG1 silicon SEM finder grid substrate is ideal for correlative microscopy since the position of the sample is easily located. Size of the EM-Tec FG1 is 12x12mm on a 12.5 x 12.5mm substrate. Primarily designed for SEM applications, but equally suitable for reflected light microscopy, AFM and Auger/SIMS.
This unique product has a number of advantages over engraved SEM stubs and the usual copper SEM finder grids:

• Ultra-flat – no height differences such as with copper finder grids
• Pattern is easily visible with unaided eye, SEM and light microscope
• Each individual field indexed with an alphanumeric label
• Low background signal for SEM imaging – similar to Si chips
• Fine bright pattern over entire area – finer than engraved stubs
• Sample size can be easily judged with the 1x1mm pattern in the background
• Compatible with Ø12.7mm pin stubs, Ø12.2mm JEOL stubs and Ø15mm Hitachi stubs
• Easy to mount on SEM and AFM stubs
• Compatible with SEM, FIB, AFM, LM, XPS/ESCA, SIMS and Auger
• Reusable – solvent resistant and plasma cleaning compatible

The EM-Tec FG1 silicon SEM finder grid substrate in packaged in a clean-room and shipped in a gel-box.

The EM-Tec FG1 finder grid is ideal for:

• correlative, corroborative, collaborative and repetitive microscopy
• multi-sample mounting for small samples
• demonstration samples with quick finder grid
• quick size estimation with the 1mm grid

Specifications of the pattern and the ultra-flat silicon wafer of the EM-Tec FG1 silicon finder grid:

Technical Support Bulletin: EM-Tec FG1 silicon SEM finder grid substrate